SiC CVD Coating

Silicon Carbide Coated Susceptors for CMOS & MOCVD

Susceptors for gas phase deposition are machined from our semiconductor purity graphite then coated with SiC using our CVD process to the customer’s specifications. The graphite substrate has been specifically chosen for the best CTE match between graphite to SiC. Thickness generally ranges from 75 to 100microns. We specialize in the pancake type susceptor but have enhanced our capabilities to produce most common susceptors. We also provide custom designed products to meet your specialized needs.


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Products Sic CVD Coating Precision Machining	SiC CVD Coating Silicon Carbide Coated Susceptors for CMOS & MOCVD Susceptors for gas phase deposition are machined from our semiconductor purity graphite then coated with SiC using our CVD process to the customer’s specifications. The graphite substrate has been specifically chosen for the best CTE match between graphite to SiC. Thickness generally ranges from 75 to 100microns. We specialize in the pancake type susceptor but have enhanced our capabilities to produce most common susceptors. We also provide custom designed products to meet your specialized needs.
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